Silicon Austria Labs (SAL)

Process Engineer - E-beam Photolithography (f/m/d)

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The Process engineer will work in ISO 4/5 cleanrooms using state of the art micro-/ nanofabrication equipment and characterization tools in the field of e-beam lithography.

Future tasks include:

  • Tool ownership of dedicated e-beam lithography system
  • Experience in layout preparation, exposure parameter optimization
  • Process testing and characterization including documentation
  • Develop and implement metrology methods to measure tool health and process performance data
  • Work hands-on with interdisciplinary teams (maintenance, facility, …)
  • Sample processing for internal/external research projects
  • Experience with troubleshooting and fingerprint of equipment
  • Documentation of standard operating procedures (SOPs), reports and cleanroom documentation


  • Bachelor / Master / PhD in relevant Engineering field
  • Several years of experience in the field of e-beam lithography
  • Hands-on metrology and characterization techniques
  • Experience with GenISys software (exposure parameter optimization & proximity effect correction) is a plus
  • Experience with automated e-beam tool is a plus
  • Experience with systems from Raith is a plus
  • Proficiency in English. German is an asset
  • A good team player with effective communication skills


  • Diversified research activities with plenty of interesting technical challenges.
  • State-of-the-art lab facilities and instruments.
  • Internal and external training opportunities for further development.
  • Home Office possible.
  • € 4 per day food allowance in restaurants or € 2 per day in supermarkets.
  • Family & kids friendly.
  • Free coffee/milk/tea & fresh fruits.

This position is subject to the Collective Agreement for employees in non-university research (Research CA) starting in occupational group E (E3 salary = EUR 3804, paid 14 times a year). For this position we offer competitive salaries and additional benefits based on your experience and qualifications, starting with a minimum salary of EUR 61.000 (annual, based on an All-in contract and bonus).

Job details

Process Engineer - E-beam Photolithography (f/m/d)
Europas­traße 12 Villach, Austria
Application deadline
Job type
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